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The effects of the pressure and the oxygen content of the sputtering gas on the structure and the properties of zinc oxy-nitride thin films deposited by reactive sputtering of zinc
Article (Web of Science)
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cited authors
Jiang, Nanke; Georgiev, Daniel G.; Jayatissa, Ahalapitiya H.
authors
Georgiev, Daniel G
Jayatissa, Ahalapitiya H
publication date
February 1, 2013
webpage
Web of Science
published in
SEMICONDUCTOR SCIENCE AND TECHNOLOGY
Journal
Research
category
PHYSICS, CONDENSED MATTER
Category
Additional Document Info
volume
28
issue
2