Reactive radio frequency sputtering deposition and characterization of zinc nitride and oxynitride thin films Article (Web of Science)

cited authors

  • Jiang, Nanke; Georgiev, Daniel G.; Wen, Ting; Jayatissa, Ahalapitiya H.

publication date

  • January 1, 2012

webpage

published in

author keyword

  • Electron diffraction spectroscopy
  • Hall effect measurements
  • Raman spectroscopy
  • Reactive radio-frequency sputtering
  • Scanning electron microscopy
  • X-ray diffraction
  • Zinc nitride
  • Zinc oxynitride

category

start page

  • 1698

end page

  • 1704

volume

  • 520

issue

  • 6