Reactive radio frequency sputtering deposition and characterization of zinc nitride and oxynitride thin films

Article (Web of Science)

• cited authors: Jiang, Nanke; Georgiev, Daniel G.; Wen, Ting; Jayatissa, Ahalapitiya H.

authors

• Georgiev, Daniel G
• Jayatissa, Ahalapitiya H

• publication date: January 1, 2012
• webpage: Web of Science
• published in: THIN SOLID FILMS Journal

author keyword

• Electron diffraction spectroscopy
• Hall effect measurements
• Raman spectroscopy
• Reactive radio-frequency sputtering
• Scanning electron microscopy
• X-ray diffraction
• Zinc nitride
• Zinc oxynitride

• category: PHYSICS, CONDENSED MATTER Category
• start page: 1698
• end page: 1704
• volume: 520
• issue: 6