Analysis of controlled mixed-phase, amorphous plus microcrystalline. silicon thin films by real time spectroscopic ellipsometry Article (Web of Science)

cited authors

  • Podraza, N. J.; Li, Jing; Wronski, C. R.; Dickey, E. C.; Collins, R. W.

authors

publication date

  • November 1, 2009

webpage

published in

category

start page

  • 1255

end page

  • 1259

volume

  • 27

issue

  • 6