Analysis of the optical properties and structure of sculptured thin films from spectroscopic Mueller matrix ellipsometry Article (Web of Science)

authors

  • Podraza, N.J.
  • Chen, Chi
  • An, Ilsin
  • Ferreira, G.M.
  • Rovira, P.I.
  • Messier, R.
  • Collins, Robert W

publication date

  • 2004

published in

number of pages

  • 4

start page

  • 571

end page

  • 575

volume

  • 455-456