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Experimental and theoretical study of the evolution of surface roughness in amorphous silicon films grown by low-temperature plasma-enhanced chemical vapor deposition
Article (Web of Science)
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authors
Kryukov, Y. A.
Podraza, Nikolas J
Collins, Robert W
Amar, Jacques G
publication date
2009
webpage
http://dx.doi.org/10.1103/physrevb.80.085403
published in
PHYSICAL REVIEW B
Journal
Additional Document Info
start page
085403
volume
80
issue
8