Influence of Deposition Parameters on Silicon Thin Films Deposited by Magnetron Sputtering Proceedings Paper (Web of Science)

cited authors

  • Rajan, Grace; Miryala, Tejaswini; Karki, Shankar; Collins, Robert W.; Podraza, Nikolas; Marsillac, Sylvain; IEEE

publication date

  • January 1, 2017


author keyword

  • Ion beam
  • Silicon
  • Sputtering
  • Thin film properties


start page

  • 2646

end page

  • 2649