Influence of Deposition Parameters on Silicon Thin Films Deposited by Magnetron Sputtering

Proceedings Paper (Web of Science)

• cited authors: Rajan, Grace; Miryala, Tejaswini; Karki, Shankar; Collins, Robert W.; Podraza, Nikolas; Marsillac, Sylvain; IEEE
• authors: Podraza, Nikolas J
• publication date: January 1, 2017
• webpage: Web of Science
• published in: 2012 IEEE 38TH PHOTOVOLTAIC SPECIALISTS CONFERENCE (PVSC), VOL 2 Book

author keyword

• Ion beam
• Silicon
• Sputtering
• Thin film properties

• category: PHYSICS, APPLIED Category
• start page: 2646
• end page: 2649