Optical Monitoring and Control of Three-Stage Coevaporated Cu(In1-xGax)Se-2 by Real-Time Spectroscopic Ellipsometry Proceedings Paper (Web of Science)

cited authors

  • Attygalle, Dinesh; Ranjan, Vikash; Aryal, Puruswottam; Pradhan, Puja; Marsillac, Sylvain; Podraza, Nikolas J.; Collins, Robert W.; IEEE

publication date

  • January 1, 2013


author keyword

  • Ellipsometry
  • monitoring
  • optical variables measurement
  • photovoltaic (PV) cells
  • process control
  • semiconductor film
  • thickness measurement