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Optical Monitoring and Control of Three-Stage Coevaporated Cu(In1-xGax)Se-2 by Real-Time Spectroscopic Ellipsometry
Proceedings Paper (Web of Science)
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cited authors
Attygalle, Dinesh; Ranjan, Vikash; Aryal, Puruswottam; Pradhan, Puja; Marsillac, Sylvain; Podraza, Nikolas J.; Collins, Robert W.; IEEE
authors
Podraza, Nikolas J
publication date
January 1, 2013
webpage
Web of Science
published in
2012 IEEE 38TH PHOTOVOLTAIC SPECIALISTS CONFERENCE (PVSC), VOL 2
Book
Research
author keyword
Ellipsometry
monitoring
optical variables measurement
photovoltaic (PV) cells
process control
semiconductor film
thickness measurement
category
ENGINEERING, ELECTRICAL & ELECTRONIC
Category