Applications of real-time and mapping spectroscopic ellipsometry for process development and optimization in hydrogenated silicon thin-film photovoltaics technology Article (Web of Science)

International Collaboration

cited authors

  • Dahal, Lila Raj; Li, Jian; Stoke, Jason A.; Huang, Zhiquan; Shan, Ambalanath; Ferlauto, Andre S.; Wronski, Christopher R.; Collins, Robert W.; Podraza, Nikolas J.

publication date

  • October 1, 2014


author keyword

  • Hydrogenated amorphous silicon (a-Si:H)
  • Mapping spectroscopic ellipsometry
  • Real time spectroscopic ellipsometry (RTSE)
  • Roll-to-roll deposition
  • Thin film Si solar cells
  • hydrogenated nanoaystalline silicon (nc-Si:H)


start page

  • 32

end page

  • 56


  • 129