Applications of real-time and mapping spectroscopic ellipsometry for process development and optimization in hydrogenated silicon thin-film photovoltaics technology
Article (Web of Science)
Dahal, Lila Raj; Li, Jian; Stoke, Jason A.; Huang, Zhiquan; Shan, Ambalanath; Ferlauto, Andre S.; Wronski, Christopher R.; Collins, Robert W.; Podraza, Nikolas J.