Applications of real-time and mapping spectroscopic ellipsometry for process development and optimization in hydrogenated silicon thin-film photovoltaics technology

Article (Web of Science)

• cited authors: Dahal, Lila Raj; Li, Jian; Stoke, Jason A.; Huang, Zhiquan; Shan, Ambalanath; Ferlauto, Andre S.; Wronski, Christopher R.; Collins, Robert W.; Podraza, Nikolas J.
• authors: Podraza, Nikolas J
• publication date: October 1, 2014
• webpage: Web of Science
• published in: SOLAR ENERGY MATERIALS AND SOLAR CELLS Journal

author keyword

• Hydrogenated amorphous silicon (a-Si:H)
• Mapping spectroscopic ellipsometry
• Real time spectroscopic ellipsometry (RTSE)
• Roll-to-roll deposition
• Thin film Si solar cells
• hydrogenated nanoaystalline silicon (nc-Si:H)

• category: PHYSICS, APPLIED Category
• start page: 32
• end page: 56
• volume: 129