Characterization of iridium oxide thin films deposited by pulsed-direct-current reactive sputtering

Article (Web of Science)

• cited authors: Thanawala, Sachin; Georgiev, Daniel G.; Baird, Ronald J.; Auner, Gregory
• authors: Georgiev, Daniel G
• publication date: June 25, 2007
• webpage: Web of Science
• published in: THIN SOLID FILMS Journal

author keyword

• RBS
• XPS
• iridium oxide
• pulsed-DC reactive sputtering

• category: PHYSICS, CONDENSED MATTER Category
• start page: 7059
• end page: 7065
• volume: 515
• issue: 18