Development of deposition phase diagrams for thin film Si : H and Si1-xGex : H using real time spectroscopic ellipsometry Proceedings Paper (Web of Science)

cited authors

  • Podraza, NJ; Ferreira, GM; Wronski, CR; Collins, RW; Collins, RW; Taylor, PC; Kondo, M; Carius, R; Biswas, R

authors

publication date

  • January 1, 2005

webpage

published in

start page

  • 43

end page

  • 48

volume

  • 862