Ultraviolet-extended real-time spectroscopic ellipsometry for characterization of phase evolution in BN thin films Article (Web of Science)

authors

  • Zapien, J. A.
  • Messier, R.

publication date

  • 2001

webpage

published in

number of pages

  • 2

start page

  • 1982

end page

  • 1984

volume

  • 78

issue

  • 14