Evolutionary phase diagrams for plasma-enhanced chemical vapor deposition of silicon thin films from hydrogen-diluted silane Article (Web of Science)

authors

  • Koh, Joohyun
  • Ferlauto, A. S.
  • Rovira, P. I.
  • Wronski, C. R.

publication date

  • 1999

webpage

published in

number of pages

  • 2

start page

  • 2286

end page

  • 2288

volume

  • 75

issue

  • 15