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Thickness change in an annealed amorphous silicon film detected by spectroscopic ellipsometry
Article (Web of Science)
Overview
Additional Document Info
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Overview
authors
Yamaguchi, T.
Kaneko, Y.
Jayatissa, Ahalapitiya H
Aoyama, M.
publication date
1996
webpage
http://dx.doi.org/10.1016/0040-6090(95)08169-0
published in
THIN SOLID FILMS
Journal
Additional Document Info
number of pages
5
start page
174
end page
179
volume
279
issue
1-2