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Correlation of real time spectroellipsometry and atomic force microscopy measurements of surface roughness on amorphous semiconductor thin films
Article (Web of Science)
Overview
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authors
Koh, Joohyun
Lu, Yiwei
Wronski, C. R.
Kuang, Yalei
Tsong, T. T.
Strausser, Y. E.
publication date
1996
webpage
http://dx.doi.org/10.1063/1.117397
published in
APPLIED PHYSICS LETTERS
Journal
Additional Document Info
number of pages
2
start page
1297
end page
1299
volume
69
issue
9