Correlation of real time spectroellipsometry and atomic force microscopy measurements of surface roughness on amorphous semiconductor thin films Article (Web of Science)

authors

  • Koh, Joohyun
  • Lu, Yiwei
  • Wronski, C. R.
  • Kuang, Yalei
  • Collins, Robert W
  • Tsong, T. T.
  • Strausser, Y. E.

publication date

  • 1996

published in

number of pages

  • 2

start page

  • 1297

end page

  • 1299

volume

  • 69

issue

  • 9