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Properties of heavily phosphorous-doped μc-Si deposited by mesh attached cathode-type r.f. glow discharge
Article (Web of Science)
Overview
Additional Document Info
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authors
Jayatissa, Ahalapitiya H
Hatanaka, Yoshinori
Nakanishi, Yoichiro
Yamaguchi, Tomuo
publication date
1996
webpage
http://dx.doi.org/10.1016/0040-6090(95)07083-4
published in
THIN SOLID FILMS
Journal
Additional Document Info
number of pages
6
start page
113
end page
119
volume
274
issue
1-2