Simultaneous determination of reflectance spectra along with {ψ(E), Δ(E)} in multichannel ellipsometry: applications to instrument calibration and reduction of real-time data Article (Web of Science)

authors

  • An, Ilsin
  • Lee, Joungchel
  • Hong, Byungyou

publication date

  • 1998

webpage

published in

number of pages

  • 5

start page

  • 79

end page

  • 84

volume

  • 313-314