Toggle navigation
Browse
Home
People
Departments & Colleges
Research
Research Area Overlaps
Simultaneous determination of reflectance spectra along with {ψ(E), Δ(E)} in multichannel ellipsometry: applications to instrument calibration and reduction of real-time data
Article (Web of Science)
Overview
Additional Document Info
View All
Overview
authors
An, Ilsin
Lee, Joungchel
Hong, Byungyou
publication date
1998
webpage
http://dx.doi.org/10.1016/s0040-6090(97)00774-8
published in
THIN SOLID FILMS
Journal
Additional Document Info
number of pages
5
start page
79
end page
84
volume
313-314