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Microcrystalline structure of poly-Si films prepared by cathode-type r.f. glow discharge
Article (Web of Science)
Overview
Additional Document Info
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Overview
authors
Jayatissa, Ahalapitiya H
Suzuki, M.
Nakanishi, Y.
Hatanaka, Y.
publication date
1995
webpage
http://dx.doi.org/10.1016/0040-6090(94)09291-5
published in
THIN SOLID FILMS
Journal
Additional Document Info
number of pages
5
start page
234
end page
239
volume
256
issue
1-2