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Application of real time spectroscopic ellipsometry for high resolution depth profiling of compositionally graded amorphous silicon alloy thin films
Article (Web of Science)
Overview
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authors
Fujiwara, H.
Koh, Joohyun
Wronski, C. R.
publication date
1997
webpage
http://dx.doi.org/10.1063/1.118972
published in
APPLIED PHYSICS LETTERS
Journal
Additional Document Info
number of pages
2
start page
2150
end page
2152
volume
70
issue
16