Application of real time spectroscopic ellipsometry for high resolution depth profiling of compositionally graded amorphous silicon alloy thin films Article (Web of Science)

authors

  • Fujiwara, H.
  • Koh, Joohyun
  • Wronski, C. R.

publication date

  • 1997

webpage

published in

number of pages

  • 2

start page

  • 2150

end page

  • 2152

volume

  • 70

issue

  • 16