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In situ ellipsometry as a diagnostic of thin‐film growth: Studies of amorphous carbon
Article (Web of Science)
Overview
Additional Document Info
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Overview
publication date
1989
webpage
http://dx.doi.org/10.1116/1.576289
published in
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
Journal
Additional Document Info
number of pages
7
start page
1378
end page
1385
volume
7
issue
3