Excimer laser modification of thin AlN films Article (Web of Science)

authors

  • Georgiev, Daniel G
  • Rosenberger, L.W.
  • Danylyuk, Y.V.
  • Baird, R.J.
  • Newaz, G.
  • Shreve, G.
  • Auner, G.

publication date

  • 2005

webpage

published in

number of pages

  • 8

start page

  • 45

end page

  • 53

volume

  • 249

issue

  • 1-4