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Excimer laser modification of thin AlN films
Article (Web of Science)
Overview
Additional Document Info
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Overview
authors
Georgiev, Daniel G
Rosenberger, L.W.
Danylyuk, Y.V.
Baird, R.J.
Newaz, G.
Shreve, G.
Auner, G.
publication date
2005
webpage
http://dx.doi.org/10.1016/j.apsusc.2004.11.027
published in
APPLIED SURFACE SCIENCE
Journal
Additional Document Info
number of pages
8
start page
45
end page
53
volume
249
issue
1-4