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Real time spectroscopic ellipsometry for characterization of nucleation, growth, and optical functions of thin films
Article (Web of Science)
Overview
Additional Document Info
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Overview
authors
An, Ilsin
Nguyen, H.V.
Lu, Yiwei
publication date
1993
webpage
http://dx.doi.org/10.1016/0040-6090(93)90100-4
published in
THIN SOLID FILMS
Journal
Additional Document Info
number of pages
8
start page
244
end page
252
volume
233
issue
1-2