Real time spectroscopic ellipsometry for characterization of nucleation, growth, and optical functions of thin films Article (Web of Science)

authors

  • An, Ilsin
  • Nguyen, H.V.
  • Lu, Yiwei

publication date

  • 1993

published in

number of pages

  • 8

start page

  • 244

end page

  • 252

volume

  • 233

issue

  • 1-2