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Real time spectroscopic ellipsometry for characterization of the crystallization of amorphous silicon by thermal annealing
Article (Web of Science)
Overview
Additional Document Info
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Overview
authors
Wakagi, M.
Fujiwara, H.
publication date
1998
webpage
http://dx.doi.org/10.1016/s0040-6090(97)00865-1
published in
THIN SOLID FILMS
Journal
Additional Document Info
number of pages
4
start page
464
end page
468
volume
313-314