Real time spectroscopic ellipsometry for characterization of the crystallization of amorphous silicon by thermal annealing Article (Web of Science)

authors

  • Wakagi, M.
  • Fujiwara, H.

publication date

  • 1998

webpage

published in

number of pages

  • 4

start page

  • 464

end page

  • 468

volume

  • 313-314