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Insights into deposition processes for amorphous semiconductor materials and devices from real time spectroscopic ellipsometry
Article (Web of Science)
Overview
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authors
Burnham, J.S.
Kim, Sangbo
Koh, Joohyun
Lu, Yiwei
Wronski, C.R.
publication date
1996
webpage
http://dx.doi.org/10.1016/0022-3093(96)00015-4
published in
JOURNAL OF NON-CRYSTALLINE SOLIDS
Journal
Additional Document Info
number of pages
5
start page
981
end page
986
volume
198-200