Insights into deposition processes for amorphous semiconductor materials and devices from real time spectroscopic ellipsometry Article (Web of Science)

authors

  • Burnham, J.S.
  • Kim, Sangbo
  • Koh, Joohyun
  • Lu, Yiwei
  • Wronski, C.R.

publication date

  • 1996

webpage

published in

number of pages

  • 5

start page

  • 981

end page

  • 986

volume

  • 198-200