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Characterization of cubic boron nitride growth using UV-extended real-time spectroscopic ellipsometry: Effect of plasma additions and dynamic substrate bias steps
Article (Web of Science)
Overview
Additional Document Info
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Overview
authors
Zapien, J. A.
Collins, Robert W
Messier, R.
publication date
2002
webpage
http://dx.doi.org/10.1116/1.1486226
published in
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
Journal
Additional Document Info
number of pages
12
start page
1395
end page
1407
volume
20
issue
4