Characterization of cubic boron nitride growth using UV-extended real-time spectroscopic ellipsometry: Effect of plasma additions and dynamic substrate bias steps Article (Web of Science)

authors

  • Zapien, J. A.
  • Messier, R.

publication date

  • 2002

webpage

published in

number of pages

  • 12

start page

  • 1395

end page

  • 1407

volume

  • 20

issue

  • 4