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Recent progress in thin film growth analysis by multichannel spectroscopic ellipsometry
Article (Web of Science)
Overview
Additional Document Info
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authors
Koh, Joohyun
Fujiwara, H
Rovira, P.I
Ferlauto, A.S
Zapien, J.A
Wronski, C.R
Messier, R
publication date
2000
webpage
http://dx.doi.org/10.1016/s0169-4332(99)00482-1
published in
APPLIED SURFACE SCIENCE
Journal
Additional Document Info
number of pages
11
start page
217
end page
228
volume
154-155