Recent progress in thin film growth analysis by multichannel spectroscopic ellipsometry Article (Web of Science)

authors

  • Collins, Robert W
  • Koh, Joohyun
  • Fujiwara, H
  • Rovira, P.I
  • Ferlauto, A.S
  • Zapien, J.A
  • Wronski, C.R
  • Messier, R

publication date

  • 2000

webpage

published in

number of pages

  • 11

start page

  • 217

end page

  • 228

volume

  • 154-155