Multichannel ellipsometry from 1.5 to 6.5 eV for real time characterization of wide band gap materials: phase identification in boron nitride thin films Article (Web of Science)

authors

  • Zapien, J.A
  • Messier, R

publication date

  • 2001

webpage

published in

number of pages

  • 6

start page

  • 1304

end page

  • 1310

volume

  • 10

issue

  • 3-7