Rotating-compensator multichannel ellipsometry for characterization of the evolution of nonuniformities in diamond thin-film growth Article (Web of Science)

authors

  • Lee, Joungchel
  • An, Ilsin

publication date

  • 1998

published in

number of pages

  • 2

start page

  • 900

end page

  • 902

volume

  • 72

issue

  • 8