Monitoring ion etching of GaAs/AlGaAs heterostructures by real time spectroscopic ellipsometry: Determination of layer thicknesses, compositions, and surface temperature Article (Web of Science)

authors

  • Heyd, A. R.
  • Vedam, K.
  • Bose, S. S.
  • Miller, D. L.

publication date

  • 1992

webpage

published in

number of pages

  • 2

start page

  • 2776

end page

  • 2778

volume

  • 60

issue

  • 22