Monitoring ion etching of GaAs/AlGaAs heterostructures by real time spectroscopic ellipsometry: Determination of layer thicknesses, compositions, and surface temperature Article (Web of Science)

authors

publication date

  • 1992

published in

number of pages

  • 2

start page

  • 2776

end page

  • 2778

volume

  • 60

issue

  • 22