Depth-profiles in compositionally-graded amorphous silicon alloy thin films analyzed by real time spectroscopic ellipsometry Article (Web of Science)

authors

  • Fujiwara, H.
  • Koh, Joohyun

publication date

  • 1998

webpage

published in

number of pages

  • 4

start page

  • 474

end page

  • 478

volume

  • 313-314