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Depth-profiles in compositionally-graded amorphous silicon alloy thin films analyzed by real time spectroscopic ellipsometry
Article (Web of Science)
Overview
Additional Document Info
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Overview
authors
Fujiwara, H.
Koh, Joohyun
publication date
1998
webpage
http://dx.doi.org/10.1016/s0040-6090(97)00867-5
published in
THIN SOLID FILMS
Journal
Additional Document Info
number of pages
4
start page
474
end page
478
volume
313-314