Real time analysis of amorphous and microcrystalline silicon film growth by multichannel ellipsometry Article (Web of Science)

authors

  • Collins, Robert W
  • Koh, Joohyun
  • Ferlauto, A.S.
  • Rovira, P.I.
  • Lee, Yeeheng
  • Koval, R.J.
  • Wronski, C.R.

publication date

  • 2000

published in

number of pages

  • 8

start page

  • 129

end page

  • 137

volume

  • 364

issue

  • 1-2