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Real time analysis of amorphous and microcrystalline silicon film growth by multichannel ellipsometry
Article (Web of Science)
Overview
Additional Document Info
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authors
Koh, Joohyun
Ferlauto, A.S.
Rovira, P.I.
Lee, Yeeheng
Koval, R.J.
Wronski, C.R.
publication date
2000
webpage
http://dx.doi.org/10.1016/s0040-6090(99)00925-6
published in
THIN SOLID FILMS
Journal
Additional Document Info
number of pages
8
start page
129
end page
137
volume
364
issue
1-2