In‐process ellipsometric monitoring of diamond film growth by microwave plasma enhanced chemical vapor deposition Article (Web of Science)

authors

  • Hayashi, Yasuaki
  • Drawl, William
  • Messier, Russell

publication date

  • 1992

webpage

published in

number of pages

  • 2

start page

  • 2868

end page

  • 2870

volume

  • 60

issue

  • 23