Advances in multichannel ellipsometric techniques for in-situ and real-time characterization of thin films Article (Web of Science)

authors

  • An, Ilsin
  • Chen, Chi
  • Ferlauto, A.S.
  • Zapien, J.A.

publication date

  • 2004

published in

number of pages

  • 8

start page

  • 38

end page

  • 46

volume

  • 469-470