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Advances in multichannel ellipsometric techniques for in-situ and real-time characterization of thin films
Article (Web of Science)
Overview
Additional Document Info
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authors
An, Ilsin
Chen, Chi
Ferlauto, A.S.
Zapien, J.A.
publication date
2004
webpage
http://dx.doi.org/10.1016/j.tsf.2004.06.185
published in
THIN SOLID FILMS
Journal
Additional Document Info
number of pages
8
start page
38
end page
46
volume
469-470