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Optical characterization of continuous compositional gradients in thin films by real time spectroscopic ellipsometry
Article (Web of Science)
Overview
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Overview
authors
Kim, Sangbo
publication date
1995
webpage
http://dx.doi.org/10.1063/1.114935
published in
APPLIED PHYSICS LETTERS
Journal
Additional Document Info
number of pages
2
start page
3010
end page
3012
volume
67
issue
20