Nucleation and bulk film growth kinetics of nanocrystalline diamond prepared by microwave plasma‐enhanced chemical vapor deposition on silicon substrates Article (Web of Science)

authors

  • Lee, Joungchel
  • Hong, Byungyou
  • Messier, R.

publication date

  • 1996

published in

number of pages

  • 2

start page

  • 1716

end page

  • 1718

volume

  • 69

issue

  • 12