Low Temperature Fabrication of Thin Film Transistors using Microcrystalline Si Deposited by Cathode-Type RF Glow Discharge Article (Web of Science)

authors

publication date

  • 1996

webpage

published in

number of pages

  • 1

start page

  • 5687

end page

  • 5688

volume

  • 35

issue

  • Part 1, No. 11