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Low Temperature Fabrication of Thin Film Transistors using Microcrystalline Si Deposited by Cathode-Type RF Glow Discharge
Article (Web of Science)
Overview
Additional Document Info
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authors
Jayatissa, Ahalapitiya H
Hatanaka, Yoshinori
Nakanishi, Yoichiro
Yamaguchi, Tomuo
publication date
1996
webpage
http://dx.doi.org/10.1143/jjap.35.5687
published in
JAPANESE JOURNAL OF APPLIED PHYSICS
Journal
Additional Document Info
number of pages
1
start page
5687
end page
5688
volume
35
issue
Part 1, No. 11