Ultrananocrystalline diamond thin films for MEMS and moving mechanical assembly devices Article (Web of Science)

authors

  • Krauss, A.R.
  • Auciello, O.
  • Gruen, D.M.
  • Jayatissa, Ahalapitiya H
  • Sumant, A.
  • Tucek, J.
  • Mancini, D.C.
  • Moldovan, N.
  • Erdemir, A.
  • Ersoy, D.
  • Gardos, M.N.
  • Busmann, H.G.
  • Meyer, E.M.
  • Ding, M.Q.

publication date

  • 2001

webpage

published in

number of pages

  • 9

start page

  • 1952

end page

  • 1961

volume

  • 10

issue

  • 11