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Ultrananocrystalline diamond thin films for MEMS and moving mechanical assembly devices
Article (Web of Science)
Overview
Additional Document Info
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authors
Krauss, A.R.
Auciello, O.
Gruen, D.M.
Jayatissa, Ahalapitiya H
Sumant, A.
Tucek, J.
Mancini, D.C.
Moldovan, N.
Erdemir, A.
Ersoy, D.
Gardos, M.N.
Busmann, H.G.
Meyer, E.M.
Ding, M.Q.
publication date
2001
webpage
http://dx.doi.org/10.1016/s0925-9635(01)00385-5
published in
Diamond and Related Materials
Journal
Additional Document Info
number of pages
9
start page
1952
end page
1961
volume
10
issue
11