The growth of thin oxides on a‐Si and a‐Si:H in an O2 plasma Article (Web of Science)

authors

  • Tuckerman, C. J.
  • Huang, C.‐Y.
  • Windischmann, H.

publication date

  • 1985

webpage

published in

number of pages

  • 4

start page

  • 2077

end page

  • 2081

volume

  • 3

issue

  • 6