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Preparation of Polycrystalline Silicon Thin Films by Cathode-Type RF Glow Discharge Method
Article (Web of Science)
Overview
Additional Document Info
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Overview
authors
Jayatissa, Ahalapitiya H
Nakanishi, Yoichiro
Hatanaka, Yoshinori
publication date
1993
webpage
http://dx.doi.org/10.1143/jjap.32.3729
published in
JAPANESE JOURNAL OF APPLIED PHYSICS
Journal
Additional Document Info
number of pages
4
start page
3729
end page
3733
volume
32
issue
Part 1, No. 9A