Real-Time, In-Line, and Mapping Spectroscopic Ellipsometry for Applications in Cu(In $_{{\bf 1}-{\bm x}}$Ga$_{\bm x}$ )Se$_{\bf 2}$ Metrology Article (Web of Science)

authors

  • Aryal, Puruswottam
  • Pradhan, Puja
  • Attygalle, Dinesh
  • Ibdah, Abdel-Rahman A.
  • Aryal, Krishna
  • Ranjan, Vikash
  • Marsillac, Sylvain
  • Podraza, Nikolas J

publication date

  • 2014

webpage

published in

number of pages

  • 6

start page

  • 333

end page

  • 339

volume

  • 4

issue

  • 1