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Optoelectronic properties of as-deposited and annealed P-doped microcrystalline Si films deposited by rf glow discharge
Article (Web of Science)
Overview
Additional Document Info
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Overview
authors
Jayatissa, Ahalapitiya H
Yamaguchi, Tomuo
Hatanaka, Yoshinori
publication date
1996
webpage
http://dx.doi.org/10.1088/0268-1242/11/12/020
published in
SEMICONDUCTOR SCIENCE AND TECHNOLOGY
Journal
Additional Document Info
number of pages
5
start page
1882
end page
1887
volume
11
issue
12