Analysis of the ellipsometric spectra of amorphous carbon thin films for evaluation of the sp3-bonded carbon content Article (Web of Science)

authors

  • Lee, Joungchel
  • Veerasamy, V.S.
  • Robertson, J.

publication date

  • 1998

webpage

published in

number of pages

  • 10

start page

  • 999

end page

  • 1009

volume

  • 7

issue

  • 7