Quantification of microstructural evolution in sputtered a‐Si thin films by real time spectroscopic ellipsometry Article (Web of Science)

authors

  • An, Ilsin
  • Nguyen, H. V.
  • Nguyen, N. V.

publication date

  • 1991

webpage

published in

number of pages

  • 5

start page

  • 632

end page

  • 637

volume

  • 9

issue

  • 3