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Quantification of microstructural evolution in sputtered a‐Si thin films by real time spectroscopic ellipsometry
Article (Web of Science)
Overview
Additional Document Info
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Overview
authors
An, Ilsin
Nguyen, H. V.
Nguyen, N. V.
publication date
1991
webpage
http://dx.doi.org/10.1116/1.577378
published in
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
Journal
Additional Document Info
number of pages
5
start page
632
end page
637
volume
9
issue
3