Real time spectroscopic ellipsometry for characterization of thin film optical properties and microstructural evolution Article (Web of Science)

authors

  • An, Ilsin
  • Nguyen, H.V.
  • Gu, T.

publication date

  • 1991

webpage

published in

number of pages

  • 6

start page

  • 374

end page

  • 380

volume

  • 206

issue

  • 1-2