Evaluation of compositional depth profiles in mixed-phase (amorphous+crystalline) silicon films from real time spectroscopic ellipsometry Article (Web of Science)

authors

  • Ferlauto, A.S.
  • Ferreira, G.M.
  • Koval, R.J.
  • Pearce, J.M.
  • Wronski, C.R.
  • Collins, Robert W
  • Al-Jassim, M.M.
  • Jones, K.M.

publication date

  • 2004

webpage

published in

number of pages

  • 4

start page

  • 665

end page

  • 669

volume

  • 455-456