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Evaluation of compositional depth profiles in mixed-phase (amorphous+crystalline) silicon films from real time spectroscopic ellipsometry
Article (Web of Science)
Overview
Additional Document Info
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authors
Ferlauto, A.S.
Ferreira, G.M.
Koval, R.J.
Pearce, J.M.
Wronski, C.R.
Al-Jassim, M.M.
Jones, K.M.
publication date
2004
webpage
http://dx.doi.org/10.1016/j.tsf.2003.11.228
published in
THIN SOLID FILMS
Journal
Additional Document Info
number of pages
4
start page
665
end page
669
volume
455-456