Preparation of ultrathin microcrystalline silicon layers by atomic hydrogen etching of amorphous silicon and end‐point detection by real time spectroellipsometry Article (Web of Science)

authors

  • Nguyen, H. V.
  • An, Ilsin
  • Lu, Yiwei
  • Wakagi, M.
  • Wronski, C. R.

publication date

  • 1994

webpage

published in

number of pages

  • 2

start page

  • 3335

end page

  • 3337

volume

  • 65

issue

  • 26