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Characterization of Interface Layer of Silicon on Sapphire Using Spectroscopic Ellipsometry
Article (Web of Science)
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authors
Jayatissa, Ahalapitiya H
Yamaguchi, Tomuo
Sawada, Kazuaki
Aoyama, Mitsuru
Sato, Fumio
publication date
1997
webpage
http://dx.doi.org/10.1143/jjap.36.7152
published in
JAPANESE JOURNAL OF APPLIED PHYSICS
Journal
Additional Document Info
number of pages
3
start page
7152
end page
7155
volume
36
issue
Part 1, No. 12A