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Structural properties of poly-Si deposited by rf glow discharge using 100% SiH4
Article (Web of Science)
Overview
Additional Document Info
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authors
Jayatissa, Ahalapitiya H
Yamaguchi, Tomuo
Nakanishi, Yoichiro
Ishikawa, Kenji
Hatanaka, Yoshinori
publication date
1997
webpage
http://dx.doi.org/10.1016/s0169-4332(96)00822-7
published in
APPLIED SURFACE SCIENCE
Journal
Additional Document Info
number of pages
4
start page
462
end page
466
volume
113-114