Phase diagrams for Si:H film growth by plasma-enhanced chemical vapor deposition Article (Web of Science)

authors

  • Ferlauto, A.S
  • Koval, R.J
  • Wronski, C.R

publication date

  • 2002

published in

number of pages

  • 5

start page

  • 68

end page

  • 73

volume

  • 299-302