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Phase diagrams for Si:H film growth by plasma-enhanced chemical vapor deposition
Article (Web of Science)
Overview
Additional Document Info
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Overview
authors
Ferlauto, A.S
Koval, R.J
Wronski, C.R
publication date
2002
webpage
http://dx.doi.org/10.1016/s0022-3093(01)00996-6
published in
JOURNAL OF NON-CRYSTALLINE SOLIDS
Journal
Additional Document Info
number of pages
5
start page
68
end page
73
volume
299-302