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Simultaneous determination of bulk isotropic and surface-induced anisotropic complex dielectric functions of semiconductors from high speed Mueller matrix ellipsometry
Article (Web of Science)
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Additional Document Info
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authors
Chen, Chi
An, Ilsin
publication date
2004
webpage
http://dx.doi.org/10.1016/j.tsf.2004.01.005
published in
THIN SOLID FILMS
Journal
Additional Document Info
number of pages
4
start page
196
end page
200
volume
455-456