In situ determination of dielectric functions and optical gap of ultrathin amorphous silicon by real time spectroscopic ellipsometry Article (Web of Science)

authors

  • An, Ilsin
  • Li, Y. M.
  • Wronski, C. R.
  • Nguyen, H. V.

publication date

  • 1991

webpage

published in

number of pages

  • 2

start page

  • 2543

end page

  • 2545

volume

  • 59

issue

  • 20